The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 06, 2010
Filed:
Mar. 30, 2007
Applicants:
Pushkar Ranade, Hillsboro, OR (US);
Keith Zawadzki, Portland, OR (US);
Christopher Auth, Portland, OR (US);
Inventors:
Pushkar Ranade, Hillsboro, OR (US);
Keith Zawadzki, Portland, OR (US);
Christopher Auth, Portland, OR (US);
Assignee:
Intel Corporation, Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/31 (2006.01); H01L 21/469 (2006.01); H01L 29/04 (2006.01);
U.S. Cl.
CPC ...
Abstract
Methods and associated structures of forming a microelectronic device are described. Those methods may include plasma etching a portion of a source/drain region of a transistor, and then selectively wet etching the source drain region along a () plane to form at least one () region in the recessed source/drain region.