The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 06, 2010
Filed:
Jun. 22, 2005
Hengpeng Wu, Hillsborough, NJ (US);
Shuji Ding-lee, Branchburg, NJ (US);
Zhong Xiang, Edison, NJ (US);
Aritaka Hishida, Bedminster, NJ (US);
Jianhui Shan, Pennington, NJ (US);
Hong Zhuang, Raritan, NJ (US);
Hengpeng Wu, Hillsborough, NJ (US);
Shuji Ding-Lee, Branchburg, NJ (US);
Zhong Xiang, Edison, NJ (US);
Aritaka Hishida, Bedminster, NJ (US);
Jianhui Shan, Pennington, NJ (US);
Hong Zhuang, Raritan, NJ (US);
AZ Electronic Materials USA Corp., Somerville, NJ (US);
Abstract
The present invention relates to a coating solution comprising a polymer obtained by reacting a glycoluril compound with at least one reactive compound containing at least one hydroxy group and/or at least one acid group, and further where the polymer is soluble in an organic solvent. The invention also relates to a process for imaging a photoresist coated over such a coating composition and to a polymer for the coating composition.