The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 30, 2010
Filed:
Sep. 29, 2004
Applicants:
Sergei V. Koveshnikov, Hillsboro, OR (US);
Juan E. Dominguez, Hillsboro, OR (US);
Kyle Y. Flanigan, Portland, OR (US);
Ernisse Putna, Beaverton, OR (US);
Inventors:
Sergei V. Koveshnikov, Hillsboro, OR (US);
Juan E. Dominguez, Hillsboro, OR (US);
Kyle Y. Flanigan, Portland, OR (US);
Ernisse Putna, Beaverton, OR (US);
Assignee:
Intel Corporation, Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 1/00 (2006.01); B44C 1/22 (2006.01);
U.S. Cl.
CPC ...
Abstract
Systems and techniques involving optical coatings for semiconductor devices. An implementation includes a substantially isotropic, heterogeneous anti-reflective coating having a substantially equal thickness normal to any portion of a substrate independent of the orientation of the portion.