The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 30, 2010
Filed:
Jun. 28, 2005
Applicants:
Rita J. Klein, Boise, ID (US);
Adam J. Regner, Iii, Meridian, ID (US);
Inventors:
Rita J. Klein, Boise, ID (US);
Adam J. Regner, III, Meridian, ID (US);
Assignee:
Micron Technology, Inc., Boise, ID (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 18/34 (2006.01);
U.S. Cl.
CPC ...
Abstract
An electroless plating composition comprising succinic acid, potassium carbonate, a source of cobalt metal ions, a reducing agent, and water is provided. An optional buffering agent may also be included in the composition. The composition may be used to deposit cobalt metal in or on semiconductor substrate surfaces including vias, trenches, and interconnects.
Klein, Rita. (2010). Electroless plating bath composition and method of use (U.S. Patent No. 7686874). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/7686874
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile