The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 23, 2010

Filed:

Jun. 01, 2006
Applicants:

Dror Hurwitz, Gilboa, IL;

Mordechay Farkash, Haifa, IL;

Eva Igner, Haifa, IL;

Boris Statnikov, Nazerth Illit, IL;

Benny Michaeli, Nazerth Illit, IL;

Inventors:

Dror Hurwitz, Gilboa, IL;

Mordechay Farkash, Haifa, IL;

Eva Igner, Haifa, IL;

Boris Statnikov, Nazerth Illit, IL;

Benny Michaeli, Nazerth Illit, IL;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/44 (2006.01);
U.S. Cl.
CPC ...
Abstract

A method of fabricating a free standing membrane including via array in a dielectric for use as a precursor in the construction of superior electronic support structures, includes the steps of fabricating a membrane of conductive vias in a dielectric surround on a sacrificial carrier, and detaching the membrane from the sacrificial carrier to form a free standing laminated array. An electronic substrate based on such a free standing membrane may be formed by thinning and planarizing laminated array, followed by terminating.


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