The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 23, 2010
Filed:
Nov. 27, 2006
Nai-ying Lo, Kaohsiung, TW;
Nai-Ying Lo, Kaohsiung, TW;
United Microelectronics Corp., Hsinchu, TW;
Abstract
A process apparatus including a chamber, a pump, and a transportation system set between the chamber and the pump is provided. The transportation system has a pipe, a pressure control valve, and a shielding unit. The pipe has an input end connected to the chamber and an output end connected to the pump to pump fluids out of the chamber through the pipe. The pressure control valve between the input and output ends is disposed on the pipe and has a valve plate to adjust a fluid flow in the pipe. The shielding unit between the input end and the pressure control valve is disposed on the pipe and has a shielding plate to be switched between an original position and a shielding position. The shielding plate at the shielding position permits conveyance of fluids in the pipe and prevents certain liquid particles of the fluids floating in the pipe.