The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 09, 2010
Filed:
Nov. 20, 2006
Ashok Kulkarni, San Jose, CA (US);
Brian Duffy, San Jose, CA (US);
Kais Maayah, Cupertino, CA (US);
Gordon Rouse, Dublin, CA (US);
Ashok Kulkarni, San Jose, CA (US);
Brian Duffy, San Jose, CA (US);
Kais Maayah, Cupertino, CA (US);
Gordon Rouse, Dublin, CA (US);
KLA-Tencor Technologies Corp., Milpitas, CA (US);
Abstract
Various methods and systems for utilizing design data in combination with inspection data are provided. One computer-implemented method for determining a position of inspection data in design data space includes aligning data acquired by an inspection system for alignment sites on a wafer with data for predetermined alignment sites. The method also includes determining positions of the alignment sites on the wafer in design data space based on positions of the predetermined alignment sites in the design data space. In addition, the method includes determining a position of inspection data acquired for the wafer by the inspection system in the design data space based on the positions of the alignment sites on the wafer in the design data space. In one embodiment, the position of the inspection data is determined with sub-pixel accuracy.