The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 09, 2010
Filed:
Nov. 28, 2006
David Bour, Cupertino, CA (US);
Lori Washington, Union City, CA (US);
Sandeep Nijhawan, Los Altos, CA (US);
Ronald Stevens, San Ramon, CA (US);
Jacob Smith, Santa Clara, CA (US);
Alexander Tam, Union City, CA (US);
Nyi Oo Myo, Campbell, CA (US);
Steve Park, Cupertino, CA (US);
Rosemary Twist, San Jose, CA (US);
Garry Kwong, San Jose, CA (US);
Jie Su, Santa Clara, CA (US);
David Bour, Cupertino, CA (US);
Lori Washington, Union City, CA (US);
Sandeep Nijhawan, Los Altos, CA (US);
Ronald Stevens, San Ramon, CA (US);
Jacob Smith, Santa Clara, CA (US);
Alexander Tam, Union City, CA (US);
Nyi Oo Myo, Campbell, CA (US);
Steve Park, Cupertino, CA (US);
Rosemary Twist, San Jose, CA (US);
Garry Kwong, San Jose, CA (US);
Jie Su, Santa Clara, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A gaseous mixture is deposited onto a substrate surface using a showerhead. A first plenum of the showerhead has a plurality of channels fluidicly coupled with an interior of a processing chamber. A second plenum gas flows through a plurality of tubes extending from a second plenum of the showerhead through the channels into the interior of the processing chamber. The diameter of the tubes is smaller than the diameter of the channels such that a first plenum gas flows into the interior of the processing chamber through a space defined between the outer surface of the tubes and the surface of the channels. The length and diameter of the tubes determine the level of distribution and the molar ratio of the first gas and the second gas in the gaseous mixture that is deposited on the surface of the substrate.