The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 23, 2010
Filed:
Sep. 16, 2008
Applicants:
Miao-chih Hsu, Hsinchu, TW;
Tzung-ting Han, Hsinchu, TW;
Ming-shang Chen, Hsinchu, TW;
Inventors:
Assignee:
MACRONIX International Co., Ltd., Hsinchu, TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/4763 (2006.01);
U.S. Cl.
CPC ...
Abstract
Methods of contact formation and memory arrays formed using such methods, which methods include providing a substrate having a contacting area; forming a plurality of line-shape structures extending in a first direction; forming a hard mask spacer beside the line-shape structure; forming an insulating material layer above the hard mask spacer; forming a contiguous trench in the insulating material layer extending in a second direction different from the first direction and exposing the contacting area; and forming a conductive line in the trench to contact the contacting area.