The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 23, 2010
Filed:
Oct. 18, 2006
Woo-kyu Kim, Bridgewater, NJ (US);
Hengpeng Wu, Hillsborough, NJ (US);
David Abdallah, Bernardsville, NJ (US);
Mark Neisser, Whitehouse Station, NJ (US);
Pinghung LU, Bridgewater, NJ (US);
Ruzhi Zhang, Pennington, NJ (US);
M. Dalil Rahman, Flemington, NJ (US);
Woo-Kyu Kim, Bridgewater, NJ (US);
Hengpeng Wu, Hillsborough, NJ (US);
David Abdallah, Bernardsville, NJ (US);
Mark Neisser, Whitehouse Station, NJ (US);
PingHung Lu, Bridgewater, NJ (US);
Ruzhi Zhang, Pennington, NJ (US);
M. Dalil Rahman, Flemington, NJ (US);
AZ Electronic Materials USA Corp, Somerville, NJ (US);
Abstract
The present invention relates to an antireflective coating composition comprising, (i) a thermal acid generator; (ii) a crosslinkable polymer comprising at least one aromatic group; and, (iii) a polymeric crosslinker comprising at least one unit of structure (6), where Rto Ris independently selected from H, (C-C) alkyl and aromatic group, Rand Rare independently (C-C) alkyl. The invention also relates to a process for imaging the antireflective coating composition of the present invention.