The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 23, 2010
Filed:
May. 07, 2008
Dong LI, Phoenix, AZ (US);
Steven Marcus, Tempe, AZ (US);
Glen Wilk, Scottsdale, AZ (US);
Brennan Milligan, Gold Canyon, AZ (US);
Dong Li, Phoenix, AZ (US);
Steven Marcus, Tempe, AZ (US);
Glen Wilk, Scottsdale, AZ (US);
Brennan Milligan, Gold Canyon, AZ (US);
ASM America, Inc., Phoenix, AZ (US);
Abstract
Methods of forming a metal carbide film are provided. In some embodiments, a substrate is exposed to alternating pulses of a transition metal species and plasma-excited argon. The transition metal species is reacted with a carbon species to deposit a metal carbide film. The substrate is exposed to the carbon species simultaneously with the transition metal species, or the substrate is exposed to the carbon species in pulses temporally separated from the pulses of the transition metal species. In some embodiments, the carbon species and the transition metal species form parts of the same precursor compound, e.g., a metal organic compound.