The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 16, 2010
Filed:
Mar. 29, 2007
William G. Callahan, Rockport, MA (US);
Morgan D. Evans, Manchester, MA (US);
George M. Gammel, Marblehead, MA (US);
Norman E. Hussey, Middleton, MA (US);
Gregg A. Norris, Rockport, MA (US);
Joseph C. Olson, Beverly, MA (US);
William G. Callahan, Rockport, MA (US);
Morgan D. Evans, Manchester, MA (US);
George M. Gammel, Marblehead, MA (US);
Norman E. Hussey, Middleton, MA (US);
Gregg A. Norris, Rockport, MA (US);
Joseph C. Olson, Beverly, MA (US);
Varian Semiconductor Equipment Associates, Inc., Gloucester, MA (US);
Abstract
An ion beam current uniformity monitor, ion implanter and related method are disclosed. In one embodiment, the ion beam current uniformity monitor includes an ion beam current measurer including a plurality of measuring devices for measuring a current of an ion beam at a plurality of locations; and a controller for maintaining ion beam current uniformity based on the ion beam current measurements by the ion beam current measurer.