The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 16, 2010
Filed:
May. 31, 2006
Eric R. Blomiley, Boise, ID (US);
Nirmal Ramaswamy, Boise, ID (US);
Ross S. Dando, Nampa, ID (US);
Joel A. Drewes, Boise, ID (US);
Eric R. Blomiley, Boise, ID (US);
Nirmal Ramaswamy, Boise, ID (US);
Ross S. Dando, Nampa, ID (US);
Joel A. Drewes, Boise, ID (US);
Micron Technology, Inc., Boise, ID (US);
Abstract
The invention includes deposition apparatuses having reflectors with rugged reflective surfaces configured to disperse light reflected therefrom, and/or having dispersers between lamps and a substrate. The invention also includes optical methods for utilization within a deposition apparatus for assessing the alignment of a substrate within the apparatus and/or for assessing the thickness of a layer of material deposited within the apparatus.