The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 09, 2010
Filed:
Dec. 07, 2006
Julian Kaller, Koenigsbronn, DE;
Herbert Fink, Aalen, DE;
Christoph Zaczek, Heubach, DE;
Wolfgang Rupp, Schwaebisch Gmuend, DE;
Julian Kaller, Koenigsbronn, DE;
Herbert Fink, Aalen, DE;
Christoph Zaczek, Heubach, DE;
Wolfgang Rupp, Schwaebisch Gmuend, DE;
Carl Zeiss SMT AG, Oberkochen, DE;
Abstract
Described is an examination system () for locating contamination () on an optical element () installed in an optical system (), which examination system () comprises: a spatially resolving detector (); imaging optics () that magnify in particular at a magnification of between 2 times and 100 times, for magnified imaging of a surface sub-region () of the optical element () on the spatially resolving detector (); as well as a movement mechanism (), in particular a motorized movement mechanism (), for displacing the imaging optics () together with the detector () relative to the surface () of the optical element () such that any desired surface sub-region of the surface () can be imaged at magnification.