The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 02, 2010
Filed:
Jul. 14, 2005
Susumu Kasukabe, Yokohama, JP;
Yasunori Narizuka, Yokohama, JP;
Susumu Kasukabe, Yokohama, JP;
Yasunori Narizuka, Yokohama, JP;
Renesas Technology Corp., Tokyo, JP;
Abstract
A manufacturing method of a semiconductor device employing a semiconductor inspection apparatus to accurately inspect semiconductor elements while still in the wafer state, the semiconductor inspection apparatus including: a probe sheethaving contact terminalswhich contact electrodesof a waferand contact bumpselectrically connected to respective contact terminals; and a probe sheetwhich is backed by a metal filmand having contact electrodeswhich contact the contact bumpsof the probe sheetand peripheral electrodeselectrically connected to the respective contact electrodes, the waferis interposed between the probe sheetand the supporting membervia the probe sheetby reducing pressure through vacuuming, and the contact terminalswhich have a pyramidal or truncated shape are contacted to the electrodesof the waferat a desired atmospheric pressure, thereby performing the inspection.