The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 02, 2010
Filed:
Sep. 01, 2005
Eun-ae Chung, Gyeonggi-do, KR;
Jae-hyoung Choi, Gyeonggi-do, KR;
Jung-hee Chung, Seoul, KR;
Young-sun Kim, Gyeonggi-do, KR;
Cha-young Yoo, Gyeonggi-do, KR;
Eun-ae Chung, Gyeonggi-do, KR;
Jae-hyoung Choi, Gyeonggi-do, KR;
Jung-hee Chung, Seoul, KR;
Young-sun Kim, Gyeonggi-do, KR;
Cha-young Yoo, Gyeonggi-do, KR;
Abstract
A metal-insulator-metal (MIM) capacitor includes a lower electrode, a dielectric layer, and an upper electrode. The lower electrode includes a first conductive layer, a chemical barrier layer on the first conductive layer, and a second conductive layer on the chemical barrier layer. The chemical barrier layer is between the first and second conductive layers and is a different material than the first and second conductive layers. The dielectric layer is on the lower electrode. The upper electrode is on the dielectric layer opposite to the lower electrode. The first and second conductive layers can have the same thickness. The chemical barrier layer can be thinner than each of the first and second conductive layers. Related methods are discussed.