The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 02, 2010
Filed:
Sep. 09, 2004
Jozef Maria Finders, Veldhoven, NL;
Judocus Marie Dominicus Stoeldraijer, Bladel, NL;
Johannes Wilhelmus DE Klerk, Eindhoven, NL;
Jozef Maria Finders, Veldhoven, NL;
Judocus Marie Dominicus Stoeldraijer, Bladel, NL;
Johannes Wilhelmus De Klerk, Eindhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A method for exposing a resist layer on a substrate to an image of a pattern on a mask is disclosed whereby, after starting exposure and before completing exposure, a controlled amount of contrast loss is introduced by a controller in the image at the resist layer by changing during exposure the position of the substrate holder. The contrast loss affects the pitch dependency of the resolution of a lithographic projection apparatus, and its control is used to match pitch dependency of resolution between different lithographic projection apparatus.