The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 02, 2010
Filed:
May. 27, 2008
Michael Heiden, Woelfersheim, DE;
Klaus Rinn, Heuchelheim, DE;
Andreas Schaaf, Mittenaar-Bicken, DE;
Michael Heiden, Woelfersheim, DE;
Klaus Rinn, Heuchelheim, DE;
Andreas Schaaf, Mittenaar-Bicken, DE;
Vistec Semiconductor Systems GmbH, Weilburg, DE;
Abstract
A method for improving the reproducibility of a coordinate measuring machine and its accuracy is disclosed. Using at least one measuring field of a camera, a plurality of images of at least one structure on the substrate are recorded. The substrate is placed on a measuring stage traversable in the X coordinate direction and the Y coordinate direction, the position of which is determined during imaging using a displacement measuring system. The measuring field is displaced by the amount of the deviation determined.