The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 19, 2010
Filed:
Sep. 28, 2006
Applicants:
Ping Liang Tu, Hong Kong, CN;
Deming Liu, Hong Kong, CN;
Kui Kam Lam, Hong Kong, CN;
Man Chung Raymond NG, Hong Kong, CN;
Inventors:
Ping Liang Tu, Hong Kong, CN;
Deming Liu, Hong Kong, CN;
Kui Kam Lam, Hong Kong, CN;
Man Chung Raymond Ng, Hong Kong, CN;
Assignee:
ASM Assembly Automation Ltd., Hong Kong, HK;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/44 (2006.01);
U.S. Cl.
CPC ...
Abstract
A manufacturing process and apparatus therefore are provided for processing an electronic device comprising oxidizable material during processing. The electronic device is located inside a chamber and is heated a processing temperature with a heater. A reductive atmosphere is created in the chamber by supplying a gas comprising glycolic acid vapor while processing the electronic device at the processing temperature.