The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 12, 2010
Filed:
Jan. 30, 2007
Yasuharu Sasaki, Nirasaki, JP;
Takehiro Ueda, Nirasaki, JP;
Yusuke Nakagawa, Nirasaki, JP;
Nobuyuki Nagayama, Nirasaki, JP;
Taketoshi Okajo, Nirasaki, JP;
Mamoru Kosakai, Narashino, JP;
Yasuharu Sasaki, Nirasaki, JP;
Takehiro Ueda, Nirasaki, JP;
Yusuke Nakagawa, Nirasaki, JP;
Nobuyuki Nagayama, Nirasaki, JP;
Taketoshi Okajo, Nirasaki, JP;
Mamoru Kosakai, Narashino, JP;
Sumitomo Osaka Cement Co., Ltd., , JP;
Tokyo Electron Limited, , JP;
Abstract
An electrostatic chuck capable of widening a temperature range and reducing a variation in thermal conductivity between the electrostatic chuck and the flat substrate over time is provided. The chuck includes: a body that has an internal electrode for attracting a flat substrate by an electrostatic force provided therein, a plurality of protrusions formed on one surface of the body serving as an electrostatic attraction surface, and projections provided on the top surfaces of some or all of the plurality of protrusions. In the electrostatic chuck, a region of the top surface of each of the minute projections on which the flat substrate is loaded is referred to as a mounting surface, and the total area of the mounting surfaces of the minute projections is equal to or larger than 0.01% and equal to or smaller than 2% of the area of the electrostatic attraction surface.