The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 05, 2010
Filed:
Jan. 13, 2006
Applicants:
Jung-ho Lee, Suwon-si, KR;
Jun-hyun Cho, Suwon-si, KR;
Jung-sik Choi, Dongdaemun-gu, KR;
Sang-mun Chon, Yongin-si, KR;
Inventors:
Jung-Ho Lee, Suwon-si, KR;
Jun-Hyun Cho, Suwon-si, KR;
Jung-Sik Choi, Dongdaemun-gu, KR;
Sang-Mun Chon, Yongin-si, KR;
Assignee:
Samsung Electronics Co., Ltd., Suwon-Si, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/31 (2006.01); H01L 21/336 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method of forming a thin film is provided. The method includes introducing an organometallic compound represented by the following formula onto a substrate;