The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 05, 2010
Filed:
Jul. 18, 2006
Masataka Hatta, Nirasaki, JP;
Masataka Hatta, Nirasaki, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A pulsation reducing apparatus is used for an apparatus having a pump for circulating a liquid in a circulating line and a tank for storing the liquid circulating via the pump. The pulsation reducing apparatus includes a supplement tank for reserving the liquid such that a liquid surface height of the supplement tank is higher than that of the tank. The tank is connected to the supplement tank and the empty space portion of the tank is connected to the supplement tank via a gas exhaust line. When the empty space portion of the tank communicates with that of the supplement tank via the gas exhaust line due to a reduction of the liquid in the tank, the gas in the tank is exhausted to the empty space portion of the supplement tank via the gas exhaust line and the liquid in the supplement tank is supplemented into the tank.