The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 29, 2009
Filed:
Feb. 29, 2008
Applicants:
Vadim Yevgenyevich Banine, Helmond, NL;
Johannes Hubertus Josephina Moors, Helmond, NL;
Leonid Shmaenok, Nieuwegein, NL;
Nikolay Nikolaevitch Salashchenko, Nizhny Novgorod, RU;
Inventors:
Vadim Yevgenyevich Banine, Helmond, NL;
Johannes Hubertus Josephina Moors, Helmond, NL;
Leonid Shmaenok, Nieuwegein, NL;
Nikolay Nikolaevitch Salashchenko, Nizhny Novgorod, RU;
Assignee:
ASML Netherlands B.V., Veldhoven, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 5/20 (2006.01);
U.S. Cl.
CPC ...
Abstract
A multi-layered spectral purity filter improves the spectral purity of extreme ultra-violet (EUV) radiation and also collects debris emitted from a radiation source.
Quick Actions:
Banine, Vadim. (2009). Multi-layer spectral purity filter, lithographic apparatus including such a spectral purity filter, device manufacturing method, and device manufactured thereby (U.S. Patent No. 7639418). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/7639418
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile