The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 29, 2009
Filed:
May. 17, 2004
Hans-peter Feuerbaum, Munich, DE;
Jürgen Frosien, Riemerling, DE;
Uli Hoffmann, Riemerling, DE;
Dieter Winkler, Munich, DE;
Pavel Adamec, Haar, DE;
Hans-Peter Feuerbaum, Munich, DE;
Jürgen Frosien, Riemerling, DE;
Uli Hoffmann, Riemerling, DE;
Dieter Winkler, Munich, DE;
Pavel Adamec, Haar, DE;
Abstract
The present invention provides a charged particle beam device. The device comprises an emitter array for emitting a plurality of charged particle beams. The plurality of charged particle beams are imaged with a lens. An electrode unit is provided for accelerating the plurality of charged particle beams. The potential differences between a first potential of the emitter array, a second potential of the electrode unit, and a third potential of a specimen, are controlled by a first control unit and a second control unit. Thereby, the second potential is capable of accelerating the plurality of charged particle beams with respect to the first potential, and the third potential is capable of decelerating the plurality of charged particle beams with respect to the second potential.