The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 15, 2009
Filed:
Sep. 08, 2008
Kuo-ching Hsu, Chung-Ho, TW;
Chen-shien Chen, Zhuebi, TW;
Boe Su, Chiayi, TW;
Hon-lin Huang, Hsinchu, TW;
Kuo-Ching Hsu, Chung-Ho, TW;
Chen-Shien Chen, Zhuebi, TW;
Boe Su, Chiayi, TW;
Hon-Lin Huang, Hsinchu, TW;
Taiwan Semiconductor Manfacturing Company, Ltd., Hsin-Chu, TW;
Abstract
The present disclosure provide an integrated circuit. The integrated circuit includes a through-silicon-via (TSV) trench configured in a semiconductor substrate; a conductive pad formed on the semiconductor substrate, the conductive pad being adjacent the TSV trench; a silicon nitride layer disposed over the conductive pad and in the TSV trench; a titanium layer disposed on the silicon nitride layer; a titanium nitride layer disposed on the titanium layer; and a copper layer disposed on the titanium nitride layer.