The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 15, 2009
Filed:
Nov. 01, 2006
Ken-ichi Tada, Kanagawa, JP;
Koichiro Inaba, Yamaguchi, JP;
Taishi Furukawa, Kanagawa, JP;
Hirokazu Chiba, Tokyo, JP;
Tetsu Yamakawa, Tokyo, JP;
Noriaki Oshima, Kanagawa, JP;
Ken-ichi Tada, Kanagawa, JP;
Koichiro Inaba, Yamaguchi, JP;
Taishi Furukawa, Kanagawa, JP;
Hirokazu Chiba, Tokyo, JP;
Tetsu Yamakawa, Tokyo, JP;
Noriaki Oshima, Kanagawa, JP;
Tosoh Corporation, Shunan-shi, JP;
Sagami Chemical Research Center, Ayase-shi, JP;
Abstract
Objects of the present invention are to provide a novel titanium complex that has good vaporization characteristics and an excellent thermal stability, and becomes a raw material for forming a titanium-containing thin film by methods such as CVD method or ALD method, its production method, a titanium-containing thin film formed using the same, and its formation method. In the invention, a titanium complex represented by the general formula (1) is produced by reacting a diimine represented by the general formula (2) and metallic lithium, and then reacting a tetrakisamide complex represented by the general formula (3). (In the formulae, Rand Rrepresent an alkyl group having from 1 to 6 carbon atoms. Rand Reach independently represents a hydrogen atom or an alkyl group having from 1 to 3 carbon atoms. Rand Reach independently represents an alkyl group having from 1 to 4 carbon atoms.).