The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 08, 2009
Filed:
Feb. 26, 2003
Joerg Bischoff, Ilmenau, DE;
Karl Hehl, Jena, DE;
Xinhui Niu, Los Altos, CA (US);
Wen Jin, Sunnyvale, CA (US);
Joerg Bischoff, Ilmenau, DE;
Karl Hehl, Jena, DE;
Xinhui Niu, Los Altos, CA (US);
Wen Jin, Sunnyvale, CA (US);
Tokyo Electron Limited, Tokyo, JP;
Abstract
Eigensolutions for use in determining the profile of a structure formed on a semiconductor wafer can be approximated by obtaining a known set of eigenvectors associated with a first section of a hypothetical profile of the structure, where the known set of eigenvectors is used to generate a simulated diffraction signal for the hypothetical profile. A known characteristic matrix associated with a second section of a hypothetical profile is obtained, and an approximated set of eigenvalues for the second section is determined based on the known set of eigenvectors associated with the first section and the known characteristic matrix associated with the second section.