The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 08, 2009
Filed:
Jan. 16, 2007
Applicants:
Dave S. Oak, San Francisco, CA (US);
Tri DO, Fremont, CA (US);
Ronny Soetarman, Fremont, CA (US);
Steven W. Meeks, Fremont, CA (US);
Vamsi Velidandla, San Jose, CA (US);
Inventors:
Dave S. Oak, San Francisco, CA (US);
Tri Do, Fremont, CA (US);
Ronny Soetarman, Fremont, CA (US);
Steven W. Meeks, Fremont, CA (US);
Vamsi Velidandla, San Jose, CA (US);
Assignee:
KLA-Tencor Corporation, Milpitas, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01B 11/24 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method comprises generating a data set comprising first surface roughness data from a first orientation and second surface roughness data from a second orientation and determining a roughness bias parameter from the first surface roughness data and the second surface roughness data.