The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 08, 2009
Filed:
Oct. 13, 2004
Joost Jeroen Ottens, Veldhoven, NL;
Levinus Pieter Bakker, Helmond, NL;
Wilhelmus Josephus Box, Eksel, BE;
Jan Van Elp, Delft, NL;
Frank Jeroen Pieter Schuurmans, Valkenswaard, NL;
Jan Evert Van Der Werf, Waalre, NL;
Joost Jeroen Ottens, Veldhoven, NL;
Levinus Pieter Bakker, Helmond, NL;
Wilhelmus Josephus Box, Eksel, BE;
Jan Van Elp, Delft, NL;
Frank Jeroen Pieter Schuurmans, Valkenswaard, NL;
Jan Evert Van Der Werf, Waalre, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A device manufacturing method is disclosed. The method includes patterning a beam of radiation, projecting the patterned beam of radiation onto a plurality of outer target portions of a substrate in a sequence in which each subsequent outer target portion is spaced-apart from a preceding outer target portion, and subsequent to projecting the patterned beam of radiation on the plurality of outer target portions, projecting the patterned beam of radiation onto an inner target portion of the substrate.