The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 7629260 B1

Date of Patent:

Dec. 08, 2009

Filed:

Dec. 08, 2006

Organosilane hardmask compositions and methods of producing semiconductor devices using the same

Applicants:

Dong Seon Uh, Seoul-si, KR;

Hui Chan Yun, Kyeongsangnam-do, KR;

Jin Kuk Lee, Kyeonggi-do, KR;

Chang IL OH, Kyeonggi-do, KR;

Jong Seob Kim, Daejeon-si, KR;

Sang-kyun Kim, Kyeonggi-do, KR;

Sang Hak Lim, Incheon-si, KR;

Inventors:

Dong Seon Uh, Seoul-si, KR;

Hui Chan Yun, Kyeongsangnam-do, KR;

Jin Kuk Lee, Kyeonggi-do, KR;

Chang Il Oh, Kyeonggi-do, KR;

Jong Seob Kim, Daejeon-si, KR;

Sang-Kyun Kim, Kyeonggi-do, KR;

Sang Hak Lim, Incheon-si, KR;

Assignee:

Cheil Industries, Inc., , KR;

Attorney:

Myers Bigel Sibley & Sajovec, PA

Primary Examiner:

Nadine Norton

Assistant Examiner:

Maki Angadi

Int. Cl.

CPC ...

H01L 21/302 (2006.01);

U.S. Cl.

CPC ...

Abstract

Provided herein are hardmask compositions that include an organosilane polymer prepared by the reaction of one or more compounds of Formula (I)Si(OR)(OR)(OR)R

Find Patent Forward Citations

Uh, Dong. (2009). Organosilane hardmask compositions and methods of producing semiconductor devices using the same (U.S. Patent No. 7629260). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/7629260

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