The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 01, 2009
Filed:
Feb. 24, 2006
Junji Oaki, Kanagawa, JP;
Nobuyuki Harabe, Kanagawa, JP;
Junji Oaki, Kanagawa, JP;
Nobuyuki Harabe, Kanagawa, JP;
Advanced Mask Inspection Technology Inc., Yokohama-shi, JP;
Abstract
A high-accuracy image correction device adaptable for use in pattern inspection apparatus is disclosed. The device includes a correction region designation unit which designates a correction region including a pattern and its nearby portion within each of an inspection reference pattern image and a pattern image under test. The device also includes an equation generator which generates by linear predictive modeling a set of simultaneous equations for a reference pattern image within the correction region and an under-test pattern image within the correction region, a parameter generator for solving the equations to obtain more than one model parameter, and a corrected pattern image generator for using the model parameter to apply the linear predictive modeling to the reference pattern image to thereby generate a corrected pattern image. A pattern inspection method using the image correction technique is also disclosed.