The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 01, 2009
Filed:
Sep. 14, 2008
John M. DE Larios, Palo Alto, CA (US);
Aleksander Owczarz, San Jose, CA (US);
Alan Schoepp, Ben Lomond, CA (US);
Fritz Redeker, Fremont, CA (US);
John M. de Larios, Palo Alto, CA (US);
Aleksander Owczarz, San Jose, CA (US);
Alan Schoepp, Ben Lomond, CA (US);
Fritz Redeker, Fremont, CA (US);
Lam Research Corporation, Fremont, CA (US);
Abstract
A method for cleaning a substrate is provided. The method includes providing foam to a surface of the substrate, brush scrubbing the surface of the substrate, providing pressure to the foam, and channeling the pressured foam to produce jammed foam, the channeling including channeling the pressured foam into a gap, the gap being defined by a space between a surface of a brush enclosure and the surface of the substrate. The brush scrubbing of the surface of the substrate and the channeling of the pressured foam across the surface of the substrate facilitate particle removal from the surface of the substrate.