The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 24, 2009
Filed:
Aug. 24, 2006
Winston T. Parker, Raleigh, NC (US);
Van Mieczowski, Apex, NC (US);
Jim Wood, Raleigh, NC (US);
Daniel Cronin, Raleigh, NC (US);
David Emerson, Chapel Hill, NC (US);
Winston T. Parker, Raleigh, NC (US);
Van Mieczowski, Apex, NC (US);
Jim Wood, Raleigh, NC (US);
Daniel Cronin, Raleigh, NC (US);
David Emerson, Chapel Hill, NC (US);
Cree, Inc., Durham, NC (US);
Abstract
An assembly for supporting a substrate during vacuum processing operations includes a thermally conductive heat sink tray including at least one wafer pocket recessed therein, and a thermally conductive heat sink carrier in the at least one wafer pocket. The heat sink carrier includes a first surface in contact with a surface within the at least one wafer pocket and a second surface opposite the first surface. A heat sink is affixed to the second surface of the heat sink carrier.