The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 24, 2009
Filed:
Dec. 25, 2002
Shigeru Ishizawa, Yamanashi, JP;
Hiroaki Saeki, Yamanashi, JP;
Shigeru Ishizawa, Yamanashi, JP;
Hiroaki Saeki, Yamanashi, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A main carrying device forming a part of a processing system, comprising a casing () forming a main carrying chamber () having vacuum atmosphere, the casing () further comprising a plurality of transfer ports (A,B) for transferring the processed body (W) between the carrying chamberand the outside, a mobile body () is slidably installed on a guide rail () horizontally installed in the carrying chamber (), a linear motor mechanism () for moving the mobile body () along the guide rail () is installed, a holding body () for holding the processed body (W) is liftably connected to the mobile body () through a support member (), and a lifting mechanism () for lifting the support member () relative to the mobile body () is installed in the casing () at a position corresponding to the transfer ports (A,B).