The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 17, 2009
Filed:
Aug. 29, 2005
Applicants:
Tomohisa Hoshino, Amagasaki, JP;
Hiroyuki Hashimoto, Nishinomiya, JP;
Muneo Harada, Nishinomiya, JP;
Inventors:
Tomohisa Hoshino, Amagasaki, JP;
Hiroyuki Hashimoto, Nishinomiya, JP;
Muneo Harada, Nishinomiya, JP;
Assignee:
Tokyo Electron Limited, , JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R 31/02 (2006.01); G01R 31/28 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method for manufacturing a probe needle having beams and a contactor placed on tips of the beams comprises preparing a Si wafer, forming a seed layeron the Si wafer, and forming grooves in a desired shape of the beams on the seed layerby patterning a photoresist. Subsequently, the grooves are filled up with metal-plated layersto form the desired shape of beams.
Hoshino, Tomohisa. (2009). Probe needle, method for manufacturing the probe needle and method for constructing a three-dimensional structure (U.S. Patent No. 7619424). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/7619424
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile