The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 17, 2009
Filed:
Mar. 31, 2008
Shih-hsuan Kuo, Hsinchu County, TW;
Jin-liang Chen, Hsinchu, TW;
Ching-ming Yeh, Hsinchu, TW;
Shih-fang Lee, Hsinchu, TW;
Hung-ming Tai, Hsinchu, TW;
Shih-Hsuan Kuo, Hsinchu County, TW;
Jin-Liang Chen, Hsinchu, TW;
Ching-Ming Yeh, Hsinchu, TW;
Shih-Fang Lee, Hsinchu, TW;
Hung-Ming Tai, Hsinchu, TW;
Industrial Technology Research Institute, Hsin-Chu, TW;
Abstract
The invention relates to a tilting adjustable surface profilometer, comprising an apparatus capable of adjusting an image acquiring angle. The apparatus includes two types of frameworks. One is a translation-stage-type tilting adjustable surface profilometer, which is enabled by the translations of two translation stage with the rotation of a rotary rack, a surface profile with an omni-directional angle of a sample can be obtained. The other framework is a surface profilometer with an arc-trajectory tilting apparatus, which is enabled by guiding the surface profilometer to slide along the arc rails with the rotations of the rotary rack, a surface profile with an omni-directional angle of a sample can be obtained.