The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 03, 2009
Filed:
Sep. 05, 2006
Ralf Richter, Dresden, DE;
Matthias Schaller, Dresden, DE;
Ellen Claus, Dresden, DE;
Eckhard Langer, Radebeul, DE;
Ralf Richter, Dresden, DE;
Matthias Schaller, Dresden, DE;
Ellen Claus, Dresden, DE;
Eckhard Langer, Radebeul, DE;
Advanced Micro Devices, Inc., Austin, TX (US);
Abstract
By providing dummy vias below electrically non-functional metal regions, the risk for metal delamination in subsequent processes may be significantly reduced. Moreover, in some embodiments, the mechanical strength of the resulting metallization layers may be even more enhanced by providing dummy metal regions, which may act as anchors for an overlying non-functional metal region. In addition, dummy vias may also be provided in combination with electrically functional metal lines and regions, thereby also enhancing the mechanical stability and the electrical performance thereof.