The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 27, 2009

Filed:

Nov. 30, 2006
Applicants:

Avrum Freytsis, Salem, MA (US);

Matthew C. Gwinn, Winchendon, MA (US);

Eric R. Harrington, Topsfield, MA (US);

Inventors:

Avrum Freytsis, Salem, MA (US);

Matthew C. Gwinn, Winchendon, MA (US);

Eric R. Harrington, Topsfield, MA (US);

Assignee:

TEL Epion Inc., Billerica, MA (US);

Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 37/08 (2006.01);
U.S. Cl.
CPC ...
Abstract

A method and apparatusfor better controlling scanning of a workpiecethrough an ion beam pathprovide for mounting a workpieceon an elongated member, partially repetitively rotating the elongated memberaround a point of rotationto make repetitive scans of the workpiecealong and arcuate pathand bending the elongated memberat a jointto move the one and out of the ion beam pathto facilitate attachment and removal of individual workpiecesA motorused for the rotating may be suspended within a partial vacuum enclosureagainst gravity for raising and lowering the elongated member anda workpiecefor linear vertical scanning.


Find Patent Forward Citations

Loading…