The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 13, 2009
Filed:
Jun. 12, 2007
Edwin Johan Buis, Belfeld, NL;
Erik Theodorus Maria Bijlaart, Rosmalen, NL;
Christiaan Alexander Hoogendam, Westerhoven, NL;
Alexander Matthijs Struycken, Eindhoven, NL;
Arnoud Cornelis Wassink, Veldhoven, NL;
Paul Peter Anna Antonius Brom, Eindhoven, NL;
Edwin Johan Buis, Belfeld, NL;
Erik Theodorus Maria Bijlaart, Rosmalen, NL;
Christiaan Alexander Hoogendam, Westerhoven, NL;
Alexander Matthijs Struycken, Eindhoven, NL;
Arnoud Cornelis Wassink, Veldhoven, NL;
Paul Peter Anna Antonius Brom, Eindhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A contamination prevention system is constructed and arranged to prevent material from propagating with radiation into a lithographic apparatus. The contamination prevention system includes a rotatable carrier provided with a plurality of generally radially outwardly extending blades. The blades are constructed and arranged to absorb or deflect the material. The system also includes a stationary shaft, and a bearing constructed and arranged to rotate the rotatable carrier and the blades around the shaft. The rotatable carrier is provided with a space for at least partially receiving a portion of the shaft.