The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 06, 2009
Filed:
Apr. 08, 2008
Applicants:
Gilad Almogy, Kiriat Ono, IL;
Bryan C. Bolt, Beaverton, OR (US);
Oded Arnon, Givataiym, IL;
Boaz Kenan, Portland, OR (US);
Ehud Tirosh, Mevaseret Zion, IL;
Michael Corliss, Beaverton, OR (US);
Inventors:
Gilad Almogy, Kiriat Ono, IL;
Bryan C. Bolt, Beaverton, OR (US);
Oded Arnon, Givataiym, IL;
Boaz Kenan, Portland, OR (US);
Ehud Tirosh, Mevaseret Zion, IL;
Michael Corliss, Beaverton, OR (US);
Assignee:
Applied Materials, Israel, Ltd., Rehovot, IL;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01B 11/14 (2006.01);
U.S. Cl.
CPC ...
Abstract
Apparatus and techniques for automated optical inspection (AOI) utilizing image scanning modules with multiple objectives for each camera are provided. A scanning mechanism includes optical components to sequentially steer optical signals from each of the multiple objectives to the corresponding camera.