The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 22, 2009
Filed:
Apr. 22, 2008
Nobuaki Matsuoka, Koshi, JP;
Takahiro Hashimoto, Koshi, JP;
Katsuhiro Tsuchiya, Tokyo, JP;
Shinichi Hayashi, Koshi, JP;
Yasushi Hayashida, Koshi, JP;
Nobuaki Matsuoka, Koshi, JP;
Takahiro Hashimoto, Koshi, JP;
Katsuhiro Tsuchiya, Tokyo, JP;
Shinichi Hayashi, Koshi, JP;
Yasushi Hayashida, Koshi, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A coater/developer is disclosed that includes a heating module having a pair of rotary bodies configured to rotate about respective horizontal axles, the rotary bodies being spaced apart from each other in a direction along the conveyance path of a substrate so that the rotational axles thereof are parallel to each other; a conveyance path member engaged with and extended between the rotary bodies so as to move along an orbit, the conveyance path member forming a part of the conveyance path of the substrate placed on the conveyance path member; a first transfer part provided at the upstream end of the conveyance path; a second transfer part provided at the downstream end of the conveyance path; and a heating part provided between the upstream end and the downstream end of the conveyance path and configured to heat the substrate.