The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 08, 2009
Filed:
Jul. 05, 2006
James W. Thackeray, Braintree, MA (US);
Gerald B. Wayton, Leicester, MA (US);
Charles R. Szmanda, Westborough, MA (US);
James W. Thackeray, Braintree, MA (US);
Gerald B. Wayton, Leicester, MA (US);
Charles R. Szmanda, Westborough, MA (US);
Rohm and Haas Electronic Materials LLC, Marlborough, MA (US);
Abstract
Underlying coating compositions are provided for use with an overcoated photoresist composition. In one aspect, the coating composition can be crosslinked and comprise one or more components that contain one or more acid-labile groups and/or one or more base-reactive groups that are reactive following crosslinking. In another aspect, underlying coating composition are provided that can be treated to provide a modulated water contact angle. Preferred coating compositions can enhance lithographic performance of an associated photoresist composition.