The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 01, 2009
Filed:
Jun. 27, 2008
Applicants:
Wolfgang Fricke, Netphen, DE;
Linda Gundal, Braunfels, DE;
Inventors:
Wolfgang Fricke, Netphen, DE;
Linda Gundal, Braunfels, DE;
Assignee:
Vistec Semiconductor Systems GmbH, Weilburg, DE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01P 11/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method for allocating correction values of the degree of bending of a substrate () relative to a coordinate system () of a coordinate measuring machine () is disclosed. The positions of the at least two reference marks () on the substrate holder () are automatically determined relative to the coordinate system () of the coordinate measuring machine () for each substrate () currently placed in the substrate holder () in the coordinate measuring machine ().