The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 01, 2009
Filed:
Apr. 12, 2006
Souichi Katagiri, Kodaira, JP;
Takashi Ohshima, Higashimurayama, JP;
Toshihide Agemura, Hitachinaka, JP;
Mitsugu Sato, Hitachinaka, JP;
Takashi Furukawa, Sagamihara, JP;
Souichi Katagiri, Kodaira, JP;
Takashi Ohshima, Higashimurayama, JP;
Toshihide Agemura, Hitachinaka, JP;
Mitsugu Sato, Hitachinaka, JP;
Takashi Furukawa, Sagamihara, JP;
Hitachi High-Technologies Corp., Tokyo, JP;
Abstract
A small-sized charged particle beam apparatus capable of maintaining high vacuum even during emission of an electron beam is provided. A nonevaporative getter pump is placed upstream of differential pumping of an electron optical system of the charged particle beam apparatus, and a minimum number of ion pumps are placed downstream, so that both the pumps are used in combination. Further, by mounting a detachable coil on an electron gun part, the inside of a column can be maintained under high vacuum with a degree of vacuum in the order of 10Pa.