The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 18, 2009
Filed:
Mar. 11, 2004
Pieter Johannes Marius Van Groos, Eindhoven, NL;
Jan Frederik Hoogkamp, Breda, NL;
Josephus Cornelius Johannes Antonius Vugts, Waalwijk, NL;
Robert Gordon Livesey, Haywards Heath, GB;
Johannes Hendrikus Gertrudis Franssen, Eersel, NL;
Albert Jan Hendrik Klomp, Eindhoven, NL;
Johannes Petrus Martinus Bernardus Vermeulen, Helmond, NL;
Erik Roelof Loopstra, Heeze, NL;
Pieter Johannes Marius Van Groos, Eindhoven, NL;
Jan Frederik Hoogkamp, Breda, NL;
Josephus Cornelius Johannes Antonius Vugts, Waalwijk, NL;
Robert Gordon Livesey, Haywards Heath, GB;
Johannes Hendrikus Gertrudis Franssen, Eersel, NL;
Albert Jan Hendrik Klomp, Eindhoven, NL;
Johannes Petrus Martinus Bernardus Vermeulen, Helmond, NL;
Erik Roelof Loopstra, Heeze, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A method of and apparatus for maintaining a machine part arranged in an interior space of a machine, where the interior space is kept at a first pressure and is separated from an environment having a second pressure via a load lock. The method includes transporting a machine part via the load lock out of the interior space and transporting via the load lock into the interior space one of the maintained machine part and a separate replacement machine part.