The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 7571019 B1

PDF
Full Text
Expired
Date of Patent:
Aug. 04, 2009

Filed:

Dec. 30, 2005
Applicants:

Charles H. Winstead, Portland, OR (US);

Rajshree P. Sankaran, Portland, OR (US);

Samer M. Taha, Beaverton, OR (US);

Jiang Qu, Portland, OR (US);

Chandra Mouli, Portland, OR (US);

Inventors:

Charles H. Winstead, Portland, OR (US);

Rajshree P. Sankaran, Portland, OR (US);

Samer M. Taha, Beaverton, OR (US);

Jiang Qu, Portland, OR (US);

Chandra Mouli, Portland, OR (US);

Assignee:

Intel Corporation, Santa Clara, CA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G06F 19/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

According to embodiments of the invention, an integrated configuration, flow and execution systems (ICFES) may be used to specify, control and record a history of processing of both semiconductor device experimental lots and production lots of wafers. Moreover, the system allows combining of one or more partial flows of pre-existing flow blocks, and special processing into another processing flow block. A lot plan can be created that includes the flow block, and the lot plan can be updated to include partial flows and special processing before or during processing of the lot plan.


Find Patent Forward Citations

Winstead, Charles. (2009). Integrated configuration, flow and execution system for semiconductor device experimental flows and production flows (U.S. Patent No. 7571019). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/7571019

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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