The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 04, 2009
Filed:
Mar. 29, 2007
Joseph Byrne, Gardiner, NY (US);
Harry D. Clark, Walden, NY (US);
Gary R. Moore, Milton, NY (US);
Michael L. Passow, W. Hurley, NY (US);
Yiheng Xu, Hopewell Junction, NY (US);
Joseph Byrne, Gardiner, NY (US);
Harry D. Clark, Walden, NY (US);
Gary R. Moore, Milton, NY (US);
Michael L. Passow, W. Hurley, NY (US);
Yiheng Xu, Hopewell Junction, NY (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
A real time alarm classification system and method of use and, more particularly, to a residual gas analyzer configured to identify specific root causes of an abnormal condition such as, for example, contamination, undesirable process variability and equipment malfunction in wafer processing. The real-time alarm classification system comprises a computer infrastructure operable to: generate top contributors associated with an alarm triggered by sensed abnormal conditions; compare the top contributors to contributors of historic RGA (residual gas analyzer) alarms of known root causes that were generated by a validated model; and provide a probable root cause of the sensed abnormal conditions when a match is found between the top contributors and the contributors associated with the historic RGA alarms of known root causes. A method and computer readable medium is also contemplated to provide the processes.