The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 21, 2009
Filed:
Jun. 30, 2006
Joseph P. Dzengeleski, Newton, NH (US);
Greg Gibilaro, Topsfield, MA (US);
Gregg Norris, Rockport, MA (US);
David Olden, Acton, MA (US);
Tamer Onat, Winchester, MA (US);
Joseph P. Dzengeleski, Newton, NH (US);
Greg Gibilaro, Topsfield, MA (US);
Gregg Norris, Rockport, MA (US);
David Olden, Acton, MA (US);
Tamer Onat, Winchester, MA (US);
Varian Semiconductor E1quipment Associates, Inc., Gloucester, MA (US);
Abstract
A Faraday sensor test system includes a Faraday sensor configured to intercept a quantity of ions incident on said Faraday sensor, a primary conductor and a test conductor coupled to said Faraday sensor, and a controller. The controller is configured to automatically provide a test current into the test conductor in response to a test condition. The controller is further configured to receive a return current from the primary conductor in response to the test current and to compare the return current to a value representative of the test current to determine a condition of a conductive path comprising the test conductor, the Faraday sensor, and the primary conductor.