The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 21, 2009
Filed:
Mar. 29, 2007
Seiichi Kondo, Kokubunji, JP;
Yoshio Homma, Tokyo, JP;
Noriyuki Sakuma, Hachiouji, JP;
Kenichi Takeda, Tokorozawa, JP;
Kenji Hinode, Hachiouji, JP;
Seiichi Kondo, Kokubunji, JP;
Yoshio Homma, Tokyo, JP;
Noriyuki Sakuma, Hachiouji, JP;
Kenichi Takeda, Tokorozawa, JP;
Kenji Hinode, Hachiouji, JP;
Renesas Technology Corp., Tokyo, JP;
Abstract
A polishing technique wherein scratches, peeling, dishing and erosion are suppressed, a complex cleaning process and slurry supply/processing equipment are not required, and the cost of consumable items such as slurries and polishing pads is reduced. A metal film formed on an insulating film comprising a groove is polished with a polishing solution containing an oxidizer and a substance which renders oxides water-soluble, but not containing a polishing abrasive.