The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 07, 2009
Filed:
Dec. 09, 2004
Maurits Van Der Schaar, Veldhoven, NL;
Jeroen Huijbregtse, Breda, NL;
Sicco Ian Schets, Eindhoven, NL;
Bart Luc Swinnen, Holsbeek, BE;
Maurits Van Der Schaar, Veldhoven, NL;
Jeroen Huijbregtse, Breda, NL;
Sicco Ian Schets, Eindhoven, NL;
Bart Luc Swinnen, Holsbeek, BE;
ASML Netherlands B.V., Veldhoven, NL;
IMEC v.z.w., Leuven, BE;
Abstract
A method according to one embodiment of the invention relates to determining at least one parameter of a model that provides information about a position of an object. The object may include a plurality of alignment marks of which desired positions are known. The method includes measuring a plurality of positional parameters for each alignment mark. Based on the measured plurality of positional parameters, which are weighted with weighing coefficients, at least one parameter of the model of the object is determined. The numerical value of each weighing coefficient is determined together with the at least one parameter of the model.